Maruyama Chillers

Clean Room Environment

Maruyama Chillers are designed and produced to meet the demanding requirements of
the clean room manufacturing environment. The chillers are designed to applicable
Semiconductor Equipment and Materials International (SEMI) standards and with
clean room and sub-fab space a premium we provide different options to meet your
footprint needs such as stacking kits and dual or multi-channel options.
High Quality from Japanese Craftsmanship

Born from finely-tuned detailed product design and manufactured with Japanese
high tech craftsmanship in Japan, Maruyama Chillers are meeting the demanding
high quality and reliability requirements resulting in uniform wafer temperature
distribution and steady temperature accuracy needed in the production of today's
and the next generation integrated circuits.
Precision Automation for Integrated Circuit Process

Designed to automatically control to the selected temperature setpoint via control loop feedback PID controllers, Maruyama chillers are used specifically in integrated circuit (IC) manufacturing because of the chillers' quick reaction time to temperature setpoint changes and quick return to temperature stability. In IC production recipes, reaction time is a factor and Maruyama chillers react in time.

WHAT DOES MARUYAMA CHILLERS DO?

Maruyama Chillers designs, manufactures, and sells refrigeration-based, water-cooled, recirculating chillers and heat exchangers for
temperature control of closed-looped systems on semiconductor and LCD manufacturing equipment.
Our units are designed for use on a variety of systems using cooling liquids such as deionized water, inert fluids (3M™ Fluorinert™,
Solvay Galden®, DuPont™ VERTREL® SINERA™), and ethylene glycol/water.
Coolant temperature control range from minus 50°C to 200°C. In addition to a standard product line, Maruyama Chillers offers
customized designing and manufacturing for your required chiller and heat exchanger applications. Please contact us to discuss your
temperature control requirements.

Clean Room Environment

High Quality from Japanese Craftsmanship

Precision Automation for Integrated Circuit Process

WHAT DOES MARUYAMA CHILLERS DO?

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