eYR Dual Channel Series
While any of our single channel units can be replicated and made into a dual-channel unit (two channels in one housing with identical specifications), our newest dual-channel unit, the eYR-9030DC(LP) has two different channels targeting two different areas in a process tool.
The Cold Channel is specified to control the temperature of a bottom electrode, while the Hot Channel is specified to control the temperature of the top electrode or the wall of the chamber using either inert coolant or DI water. A dual-channel design reduces overall footprint when compared with two single channel units. In addition, internal parts can be reduced and shared such as the main power breaker. Instead of two breakers, there can be just one main breaker for both channels. There can also be one facility water port instead of two, depending on your facility water temperature and flow configuration.
|Controlled Temperature Range||Hot Channel||20℃ to 60℃|
|Cold Channel||-10℃ to 60℃|
|Temperature Control Accuracy||From set temperature with constant heat load||±1.0C|
|Cooling Capacity: Cold Channel**||60Hz||10,000W ±500W @ -10℃|
|Cooling Capacity: Hot Channel**||60Hz||12,000W ±500W @ 20℃|
|Heater Capacity @ AC200V||Cold Channel||1800W±100W|
|Power Consumption (200/220VAC)||Maximum||22 .5kVA|
|User Interface||Touch Panel|
|External Dimensions (W x D x H)||Inches||26 x 38 x 63|
|MM||650 x 970 x 1600|
|Standard Communications Protocol||LonWorks|
|Lam Part Number||778-140687-001|
- **Conditions: Coolant: 3283
- Coolant flow rate: 17LPM @ delta pressure 0.7MPa (4.5gpm @ delta pressure 100psi)
- Cooling water: 45LPM (12gpm) @ supply 25℃
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