Go Back Top


Maruyama Chillers designs, manufactures, and sells refrigeration-based, water-cooled, recirculating chillers and heat exchangers for
temperature control of closed-looped systems on semiconductor and LCD manufacturing equipment.
Our units are designed for use on a variety of systems using cooling liquids such as deionized water, inert fluids (3M™ Fluorinert™,
Solvay Galden®, DuPont™ VERTREL® SINERA™), and ethylene glycol/water.
Coolant temperature control range from minus 50°C to 200°C. In addition to a standard product line, Maruyama Chillers offers
customized designing and manufacturing for your required chiller and heat exchanger applications. Please contact us to discuss your
temperature control requirements.

Recent News

Maruyama Chillers Website Official Launch!


Maruyama Chillers is proud to announce the official launch of their website in the U.S.!

Read More

Fluorinert™ is a trademark of 3M™. Galden® is a registered trademark of Solvay. VERTREL® and SINERA™
are trademarks of DuPont™. Maruyama Chillers is not an affiliated company of 3M™, Solvay or DuPont™