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Maruyama Chillers designs, manufactures, and sells refrigeration-based, water-cooled, recirculating chillers and heat exchangers for
temperature control of closed-looped systems on semiconductor and LCD manufacturing equipment.
Our units are designed for use on a variety of systems using cooling liquids such as deionized water, inert fluids (3M™ Fluorinert™,
Solvay Galden®, DuPont™ VERTREL® SINERA™), and ethylene glycol/water.
Coolant temperature control range from minus 50°C to 200°C. In addition to a standard product line, Maruyama Chillers offers
customized designing and manufacturing for your required chiller and heat exchanger applications. Please contact us to discuss your
temperature control requirements.

Fluorinert™ is a trademark of 3M™. Galden® is a registered trademark of Solvay. VERTREL® and SINERA™
are trademarks of DuPont™. Maruyama Chillers is not an affiliated company of 3M™, Solvay or DuPont™