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Maruyama Chillers offers in-house chiller design and manufacturing to meet your specific temperature controlling requirements. We specialize in refrigeration-based, water-cooled, recirculating chillers and heat exchangers for temperature control of closed-looped systems on semiconductor and LCD manufacturing equipment. Our units are designed for use on a variety of systems using cooling liquids such as deionized water, inert fluids (3M™ Fluorinert™, Solvay Galden®, DuPont™ VERTREL® SINERA™), and ethylene glycol/water. Coolant temperature control range from minus 50°C to 200°C.

What does all this mean? Our units use compressors and heaters to control the coolant temperature. Facility water is required to take the heat away generated by the compressor. The manufacturing tool, most likely a wafer making process module, communicates to the chiller what temperature it wants the coolant to be at and after a ramp period, the chiller will control the coolant at the requested temperature. During the process, extreme amounts of heat are created and the coolant returns to the chiller with a large heat load. Sensing the increase in temperature, the chiller will automatically react by turning on the compressor and creating as much cooling power required until the coolant returns to the required temperature. The typical temperature range is from negative 20°C to 80°C. Depending on the heat load, our chillers typically can go from negative 20°C to 80°C in 20 minutes.

When contacting us about your customized chiller specifications, please consider what your requirements will be for the following:

  • Operating temperatures and what temperature range you want to control. For example, you want to control the coolant temperature between 50°C to 120°C but you know at 120°C the coolant returning from the tool may be as high at 150°C. Therefore, your operating temperature would be 50°C to 150°C.
  • Cooling capacity: how much heat do you want to take out of the tool and at what temperature? An example would by 6kW at -20°C.
  • Coolant: which coolant are the materials in the tool's wetted path compatible with?
  • Communications: What communications protocol is required for the manufacturing tool to communicate commands to the chiller?
  • What conditions so you want the chiller to communicate to the tool? Coolant flow? Running status?
  • Safety and Regulatory: What is required for your unit to be installed in your facilities: UL? CE? NRTL? SEMI?
  • Any specific requirements for your application?

Fluorinert™ is a trademark of 3M™. Galden® is a registered trademark of Solvay. VERTREL® and SINERA™ are trademarks of DuPont™. Maruyama Chillers is not an affiliated company of 3M™, Solvay or DuPont™

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